LASER SPRAYING TECHNOLOGY OF THIN FILMS

Abstract

Information of the main parameters of vapour condensation on the lining, as a resulted of solve the problem of obtaining periodic thin-envelope multilayer structures formed from complex compounds, is required. The results of solving this problem can be used in laser deposition of envelope to obtain mirrors of the soft X-ray range and sublattices. The authors' theoretical and experimental studies are devoted to the study of new possibilities for laser deposition of envelope of substances by giant laser pulses that combine a complex chemical composition and unique physical properties, namely, the ferroelectric SbSJ, which is characterized by anomalously high values of the piezoelectric coefficient and ferroelectric parameters, and the piezoelectric Bi₁₂GeO₂₀. In experiments with deposition using mass spectrometry, the main parameters of the laser plasma for these materials were determined. The authors analysed the electrograms and structure of SbSJ envelopes, determined the main parameters and optimal conditions for applying the envelope to the substrate.