TECHNOLOGY OF SPRAYING LAMINAS WITH NANOSECOND LASER PULSES

Abstract

In order to optimize the technological process of efficient use of excimer lasers for the needs of laminas technologies,
information is needed on the main parameters of the vapour, which condenses on the substrate. However, the properties of
films obtained by sputtering the target with nanosecond laser pulses and the properties of the vapour phase have not been
studied in practice. At the same time, mass-spectrometric and probe studies of the vapour phase make it possible to determine
a number of important condensation parameters, optimize the deposition process itself, and clarify the understanding of the
physics of evaporation of complex targets. The work resulted in the development of a method for the formation of periodic
structures upon irradiation by a train of laser pulses, which ensures the production of qualitative sublattice structures.