ANALYSIS THE METHODS OF METROLOGICAL SUPPORT OF HIGH-PRECISION ERROR CONTROL OF MECHANICAL DEVICES THE MOVEMENTS OF OBJECTS

Abstract

The article considers high-precision means of control that allow the non-contact method to measure the errors of linear displacements of objects at their significant range and in difficult operating conditions, including in the presence of vibrations. The review of the main directions of development the methods and creation of new high-precision non-contact measuring devices for control the errors of linear movements of objects caused by deviation from rectilinearity and angular displacements of objects is carried out. The principles of operation and schemes of measuring optoelectronic devices, which use a modern element base, as well as means of digital signal processing, which implement effective algorithms, are considered.