DEVELOPMENT OF THE METHOD OF IMPROVING THE ACCURACY AND SPEED OF MEASUREMENT OF NANOBJECTS

Abstract

The article identifies promising areas in metrological support for measurements in the nanometer range. It is determined that for measuring the mechanical properties of nanostructured materials with reference to the relief of the surface, the most common in use are measuring complexes that combine the capabilities of scanning probe microscopes and nanohardness testers. Therefore, the task of improving the accuracy and speed of the recognition system of the probe measuring complex due to the optimal choice of the number and location of measuring points on the surface of the nanoobject and reference points for mathematical description of topological and physical characteristics of the surface. It is proved that one of the main problems that arise in the process of measuring nanoobjects with a probe measuring complex is the negative impact of external destabilizing factors that can cause distortion of measurement information and inaccurate image of the terrain of the nanoobject. Since all destabilizing factors and the errors caused by them are unknown in advance and change randomly over time, it can be argued that we are dealing with a number of random functions of time. Based on the study, developed a method of optimal selection of the number of measuring points for mathematical description of a random process and proved that the proposed method significantly increases the accuracy and speed of the recognition system of probe measuring complexes in metrological work in the nanometer range.