SYSTEM OF AUTOMATIC ADJUSTMENT OF PRECISIONAL MOVEMENT OF THE SCANNER OF THE SCANNING PROBE MICROSCOPE

Abstract

The article presents the results of studies of a piezoelectric scanner for precision mechanical movements in a scanning probe microscope with capacitive displacement sensors and image processing methods. The choice of a capacitive sensor with a variable gap between the covers, due to high accuracy and sensitivity, simple and cheap design, as well as minimal nonlinear distortions introduced into the SPM. Estimation of control parameters, obtained using a mathematical model of SPM, allowed to design a PID controller that provides precise mechanical movement with a given accuracy. The developed method of measurement and information processing is able to track the effects of dill, hysteresis and other nonlinearities of piezoceramics. It does not depend on the influence of temperature noise, the effects of changing the parameters of the scanner over time.