METROLOGICAL PROVISION MEASUREMENT OF MECHANICAL AND TRIBOLOGICAL PROPERTIES OF MATERIALS ON SUBMICRON AND NANOMETRIC DIACHIOR

Abstract

The article reviews the methods and instrumentation for the study of tribological and mechanical properties of the surface. It is established that the most common methods for studying these properties in the micro and nanodranges are contact methods based on the interaction of the hard tip with the material under study.

In scanning probe microscopy for the complex study of tribological and mechanical properties of the surface, the main element of the measuring modules used for nanoindentation and sclerometry is a bimorph piezoceramic probe sensor with a diamond tip. The original design of the sensor allows to implement more than ten measuring techniques on one device.

The operation of these devices in the semi-contact scanning probe-microscopic mode allows to obtain images of the surface relief and a map of the distribution of elastic properties. The indentation mode allows to measure hardness and modulus of elasticity, to estimate elastic recovery of material after indentation. The method of measuring hardness according to the image of the restored imprint (a method similar to classical microindentation) is implemented. The method of scratching is implemented, followed by obtaining image of the relief of the surface on the restored imprint. The method allows to determine the abrasion resistance and hardness of the material, adhesion and thickness of thin coatings.