MULTISENSOR MEMS-BASED PLATFORMS FOR GAS ANALYSIS

Abstract

The paper presents a comparative analysis of various multisensor MEMS-based platforms for gas analysis. For effective detection of gas mixtures and individual gases, it has been found that measurement results such as sensor sensitivity, response time, and selectivity are confirmed by theoretical and experimental studies. The obtained data suggest that the use of multisensor MEMS-based platforms is promising for accurate and rapid gas analysis, as they combine high sensitivity with the capability of simultaneous monitoring of multiple parameters. The analysis results indicate that for certain types of gases, it is advisable to use a platform with integrated sensors capable of detecting multiple parameters of gas mixtures, providing more accurate results compared to the use of individual sensors.