SIMULATION OF THE DESIGN PARAMETERS INFLUENCE ON THE CHARACTERISTICS OF HUMIDITY SENSORS BASED ON NANOCELLULOSE

Abstract

In the work the effect of design parameters and electrode configuration on the parameters of resistive and capacitive sensors of relative humidity was simulated. Thus, it has been established that for resistive sensors, the best choice is the use of electrodes in the configuration of interdigital electrode. It was determined that the optimal film thickness for both types of sensors is 50 μm. For resistive sensors, the optimal distance between the electrodes is 0.4 mm, since this distance allows to get a sensor whose working range of resistance is significantly smaller compared to 0.7 mm (1 MΩ). For capacitive sensors, the 0.1mm electrode spacing configuration is preferred, as it provides better response (about 7pF) and therefore sensitivity.