DESIGN AND RESEARCH OF DOME-SHAPED TYPE ELASTIC ELEMENTS FOR MICROELECTROMECHANICAL DEVICES

Abstract

This paper presents a comprehensive study of dome-shaped elastic elements widely used in microelectromechanical systems (MEMS) as components of sensors, microactuators, switching units, and micromanipulators. An analytical and numerical design methodology has been developed using the software modules Actuator 1.0 and Actuator 2.0, with the results verified by simulations in ANSYS 14.5 and confirmed experimentally. Parametric modeling was performed to analyze the influence of the main geometric parameters (curvature radius, thickness, support radius, and central hole diameter) on the operational characteristics of the actuators. Critical parameter values were identified where the discrete behavior of the characteristic is lost, allowing the construction of the equilibrium surface and determination of the stability regions. An optimization algorithm based on an evolutionary approach was proposed to minimize the actuator area under given critical parameters. The obtained results demonstrate high reliability of the numerical calculations, with deviations below 5% compared to experimental data, and confirm the efficiency of the developed software tools for the synthesis and optimization of MEMS elastic elements.